This paper discusses results obtained in highspeed laser micro processing of zirconium oxide ceramic and stainless steel. High-PRF (pulse repetition frequency) femtosecond laser systems were joined together with fast galvanometer scanner systems. A high av. laser power (31.7 W) and fast scan speeds (17.1 m/s) were applied in order to increase material removal. The influence of av. laser power, laser energy and repetition rate on both the vol. ablation rate and the machining quality was studied. The max. vol. ablation rate for zirconium oxide was 70.3 μm3 per pulse, obtained with pulses of 5.9 μJ energy and 1.02 MHz. It is demonstrated that material removal on zirconium oxide will be strongly affected by heat. Stainless steel was irradiated with a max. laser power of 31.7 W and various repetition rates. The max. material removal rate was found to be 6.8 mm3/ min, achieved with laser pulses of 0.85 J/cm2 fluence. The feasibility of the high-speed laser technol. in micro processing is verified by machining examples. In addn., a demonstrator of 80 × 80 mm2 was machined with a processing rate as high as 25 cm2/min.