Peer-Reviewed Journal Details
Mandatory Fields
DOWLING, DP,AHERN, MJ,KELLY, TC,MEENAN, BJ,BROWN, NMD,OCONNOR, GM,GLYNN, TJ
1992
September
Surface & Coatings Technology
CHARACTERIZATION STUDY OF DIAMOND AND DIAMOND-LIKE CARBON
Published
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Optional Fields
VAPOR-PHASE SURFACE FILMS SPECTROSCOPY DEPOSITION PARTICLES
53
177
183
A comparative characterization study of diamond-like carbon (DLC) films deposited using plasma-enhanced chemical vapour deposition is presented. The films were examined using scanning electron microscopy (SEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy (AES) and Raman spectroscopy. As a result of these studies structural and chemical information was obtained on the carbon films. The SEM examination indicated the presence of high levels of stress in the diamond films. The ability of XPS and Raman spectroscopy to distinguish between diamond-type carbon (sp3 hybridized) and graphitic carbon (sp2 hybridized) is demonstrated.
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