Conference Publication Details
Mandatory Fields
Collins, AR,Milne, D,Prieto, C,O'Connor, GM,Klotzbach, U,Washio, K,Arnold, CB
Thin Glass processing with various Laser Sources
LASER-BASED MICRO- AND NANOPROCESSING IX
2015
January
Published
1
WOS: 2 ()
Optional Fields
Laser processing glass processing laser ablation ultrashort laser thin glass dielectric CO2 laser FEMTOSECOND LASER DIELECTRICS ABLATION PULSES
Laser processing of thin glass has proven problematic due to the inefficient coupling of optical energy into glass and the difficulty achieving an economical processing speed while maintaining cut quality. Laser glass processing is pertinent to touch screen display, microfluidic, microoptic and photovoltaic applications. The results of the laser scribing of 110 mu m thick alkali free glass with various laser sources are presented. The laser sources include a CO2 laser, nanosecond UV laser and femtosecond IR laser. The contrasting absorption mechanisms are discussed. Cut quality and processing speed are characterised using SEM and optical microscopy techniques. Alternative laser techniques for thin glass processing are also considered.
10.1117/12.2077217
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