Conference Publication Details
Mandatory Fields
Mullan, C,Ilie, D,Favre, S,O'Connor, GM,Glynn, TJ,Bowe, BW,Byrne, G,Flanagan, AJ,Glynn, TJ,Magee, J,OConnor, GM,ODowd, RF,OSullivan, GD,Sheridan, JT
Percussion drilling of polyimide using VUV and UV solid state lasers
Opto-Ireland 2005: Photonic Engineering
2005
May
Published
1
WOS: 3 ()
Optional Fields
polyimide percussion drilling incubation repetition rate solid state laser UPILEX-S POLYIMIDE CHEMICAL CHARACTERISTICS REPETITION-RATE YAG LASER ABLATION POLYMERS SURFACE RADIATION THRESHOLD
475
485
Percussion drilling of blind holes and vias in Kapton (R) film was investigated using Q-switched solid state lasers operating at UV (355nm) and VUV (266mn) wavelengths. Holes were analyzed using different methods such as scanning electron microscopy (SEM) and surface profilometry. Ablation rates for the two wavelengths are compared. No abrupt thresholds were found and there was no evidence of an incubation effect within the first few pulses. Introducing pauses during the drilling increased the number of shots required for perforation of the film. The effects of fluence on diameter, depth and taper of the holes are presented. Smaller and neater holes are achieved more accurately with a lower fluence. An observed skin effect brought about by long exposure to low fluence VUV laser light is also discussed.
10.1117/12.605151
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